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Silicon devices and process integration : deep submicron and nano-scale technologies /

El-Kareh, Badih. ,

Silicon devices and process integration : deep submicron and nano-scale technologies / Badih El-Kareh. - xxv, 597 pages : illustrations ; 24 cm.

ISBN: 9780387367989

Subjects--Topical Terms:
Metal oxide semiconductors,Complementary.
Linear integrated circuits --Design.

LC Class. No.: TK7871.99.M44 / .E44 2009

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