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Mems materials and processes handbook /

Mems materials and processes handbook / editors, Reza Ghodssi, Pinyen Lin. - New York : Springer, 2011. - xxxv, 1187 p. : ill. ; 24 cm. - Mems refernce shelf .

ISBN: 9780387473161

Subjects--Topical Terms:
Microelectromechanical systems --Materials.
Microelectromechanical systems.

LC Class. No.: TJ163 / .M45 2011

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