Normal view MARC view ISBD view

Field guide to optical lithography /

Mack, Chris A. ,

Field guide to optical lithography / Chris A. Mack. - xii, 122 pages : illustrations ; 21 cm. - SPIE field guides ; FG06 .

ISBN: 0819462071

Subjects--Topical Terms:
Integrated circuits --Design and construction.
Microlithography.

LC Class. No.: TK7874 / .M32 2006

Place recall
Print
Add to your cart (remove)
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)