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Mechanics of microelectronics /

Zhang, G. Q.. ,

Mechanics of microelectronics / G. Q. Zhang, W. D. van Driel and X J Fan. - xiii, 563 pages : illustrations ; 25 cm. - Solid mechanics and its applications ; v. 141 .

ISBN: 140204934X 9781402049347

Subjects--Topical Terms:
Microelectronics.
Mechanical engineering.

LC Class. No.: TK7874 / .Z42 2006

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