Multi-wafer rotating MEMS machines : turbines, generators and engines /

Multi-wafer rotating MEMS machines : turbines, generators and engines / edited by Jeffrey Lang. - xv, 456 pages : illustrations ; 24 cm. - MEMS reference shelf .

9780387777467


Microelectromechanical systems.
Turbomachines.

TK7875 / .M84 2009

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