Multi-wafer rotating MEMS machines : turbines, generators and engines /
Multi-wafer rotating MEMS machines : turbines, generators and engines /
edited by Jeffrey Lang.
- xv, 456 pages : illustrations ; 24 cm.
- MEMS reference shelf .
9780387777467
Microelectromechanical systems.
Turbomachines.
TK7875 / .M84 2009
9780387777467
Microelectromechanical systems.
Turbomachines.
TK7875 / .M84 2009