Photonic microsystems : micro and nanotechnology applied to optical devices and systems /
Solgaard, Olav. ,
Photonic microsystems : micro and nanotechnology applied to optical devices and systems / Olav Solgaard. - xvi, 631 pages : illustrations ; 24 cm. - MEMS reference shelf .
9780387290225
Microelectromechanical systems.
Photonics.
Optoelectronic devices --Design and construction.
Optical communications.
TK7875 / .S64 2009
Photonic microsystems : micro and nanotechnology applied to optical devices and systems / Olav Solgaard. - xvi, 631 pages : illustrations ; 24 cm. - MEMS reference shelf .
9780387290225
Microelectromechanical systems.
Photonics.
Optoelectronic devices --Design and construction.
Optical communications.
TK7875 / .S64 2009