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Micro-optomechatronics /

Micro-optomechatronics / Hiroshi Hosaka ... [and others]. - viii, 306 pages : illustrations ; 24 cm. - Optical engineering ; v. 92 .

ISBN: 0824759834

Subjects--Topical Terms:
Microelectromechanical systems.
Mechatronics.
Nanotechnology.
Optoelectronic devices.

LC Class. No.: TK7875 / .M53 2005

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