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Electroceramic-based MEMS : fabrication-technology and applications /

Electroceramic-based MEMS : fabrication-technology and applications / edited by Nava Setter. - xii, 414 pages : illustrations ; 24 cm. - Electronic materials : science and technology .

ISBN: 0387233105

Subjects--Topical Terms:
Microelectromechanical systems.

LC Class. No.: TK7875 / .E53 2005

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