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Silicon carbide microelectromechanical systems for harsh environments /

Silicon carbide microelectromechanical systems for harsh environments / editor, Rebecca Cheung. - x, 181 pages : illustrations ; 24 cm.

ISBN: 1860946240

Subjects--Topical Terms:
Microelectromechanical systems.
Silicon carbide.

LC Class. No.: TK7875 / .S54 2006

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