Smart material systems and MEMS : design and development methodologies /
Varadan, V. K.. ,
Smart material systems and MEMS : design and development methodologies / Vijay K. Varadan, K. J. Vinoy and S. Gopalakrishnan. - xii, 404 pages : illustrations ; 26 cm.
0470093617 9780470093610
Microelectromechanical systems.
Smart materials.
TK7875 / .V374 2006
Smart material systems and MEMS : design and development methodologies / Vijay K. Varadan, K. J. Vinoy and S. Gopalakrishnan. - xii, 404 pages : illustrations ; 26 cm.
0470093617 9780470093610
Microelectromechanical systems.
Smart materials.
TK7875 / .V374 2006