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Principles of physical vapor deposition of thin films /

Sree Harsha, K. S.. ,

Principles of physical vapor deposition of thin films / K. S. Sree Harsha. - xi, 1160 pages : illustrations ; 25 cm.

ISBN: 008044699X

Subjects--Topical Terms:
Thin films.
Vapor-plating.

LC Class. No.: QC176.83 / .S73 2006

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