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CMOS hotplate chemical microsensors /

CMOS hotplate chemical microsensors / M. Graf ... [and others]. - xii, 125 pages : illustrations (some color) ; 24 cm. - Microtechnology and MEMS .

ISBN: 3540695613 9783540695615

Subjects--Topical Terms:
Microelectromechanical systems --Design and construction.
Microfabrication.

LC Class. No.: / .TK7875.C57 2007

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