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Principles of plasma discharges and materials processing /

Lieberman, Michael A. ,

Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg. - 2nd ed. - xxxiv, 757 pages : illustrations ; 24 cm.

ISBN: 9780471720010 0471720011

Subjects--Topical Terms:
Plasma dynamics.
Thin films --Surfaces.
Plasma etching.
Plasma chemistry.

LC Class. No.: QC718.5.D9 / .L53 2005

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