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Glow discharge processes : sputtering and plasma etching /

Chapman, Brian. ,

Glow discharge processes : sputtering and plasma etching / Brian Chapman. - xv, 406 pages : illustrations ; 24 cm.

ISBN: 047107828X 9780471078289

Subjects--Topical Terms:
Sputtering (Physics).
Glow discharges.
Plasma etching.

LC Class. No.: QC702.7.P6 / .C42 1980

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