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MEMS and microsystems : design, manufacture and nanoscale engineering /

Hsu, Tai-Ran. ,

MEMS and microsystems : design, manufacture and nanoscale engineering / Tai-Ran Hsu. - 2nd ed. - xxv, 550 pages : illustrations ; 24 cm.

ISBN: 9780470083017 0470083018

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

LC Class. No.: TK7874 / .H78 2008

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