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Surfaces, interfaces, and thin films for microelectronics /

Irene, Eugene A. ,

Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. - xiii, 515 pages : illustrations ; 25 cm.

ISBN: 0470174471 9780470174470

Subjects--Topical Terms:
Surface chemistry.
Interfaces (Physical sciences).
Thin films.
Microelectronics --Materials.

LC Class. No.: QD506 / .I73 2008

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