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MEMS technology and devices /

MEMS technology and devices / Aiqun Liu ... [and others]. - xv, 441 pages : illustrations ; 24 cm.+ 1 computer optical disc (4 3/4 in.).

ISBN: 9812709606 9789812709608

Subjects--Topical Terms:
Microelectromechanical systems --Congresses.
Nanostructured materials --Congresses.

LC Class. No.: TK7875 / .I57 2007

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