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Introduction to microsystem technology : a guide for students /

Gerlach, Gerald. ,

Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dotzel ; translated by Dorte Muller. - xxiii, 351 pages : illustrations ; 26 cm.

ISBN: 9780470058619 0470058617

Subjects--Topical Terms:
Microelectromechanical systems --Design and construction.
System design.
Microelectronics.

LC Class. No.: TK7875 / .G47 2008

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