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VLSI micro- and nanophotonics : science, technology, and applications /

VLSI micro- and nanophotonics : science, technology, and applications / edited by El-Hang Lee ... [et al.] - Boca Raton, FL : CRC Press, 2011 - 1 v. (various pagings) : ill. ; 26 cm.

ISBN: 9781574447293 1574447297

Subjects--Topical Terms:
Microelectromechanical systems --Technological innovarions
Nanophotonics --Technological innovations
Integrated circuits --Very large scale integration

LC Class. No.: TK7875 / .V57 2011

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