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Digital holography for MEMS and microsystem metrology /

Digital holography for MEMS and microsystem metrology / edited by Anand Asundi. - xxii, 205 pages : illustrations ; 24 cm. - Wiley microsystem and nanotechnology series .

ISBN: 9780470978696 0470978694

Subjects--Topical Terms:
Microelectromechanical systems --Measurement.
Microelectronics --Measurement.
Holographic testing.
Image processing --Digital techniques.

LC Class. No.: TK7875 / .D53 2011

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