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Advanced mechatronics and MEMS devices /

Advanced mechatronics and MEMS devices / ediotr Dan Zhang. - xi, 249 pages : illustrations (some color) ; 24 cm. - Microsystems ; v. 23 .

ISBN: 9781441999849 1441999841

Subjects--Topical Terms:
Microelectromechanical systems.
Mechatronics.

LC Class. No.: TK7875 / .A37 2013

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