Micro and smart systems : technology and modeling /
Micro and smart systems : technology and modeling /
G.K. Ananthasuresh ... [and others].
- xxi, 474 pages : illustrations ; 27 cm.
0470919396 9780470919392
Microelectromechanical systems--Design and construction.
Intelligent control systems--Design and construction.
Technology and engineering --Electronics --Microelectronics.
TK7875 / .M52 2012
0470919396 9780470919392
Microelectromechanical systems--Design and construction.
Intelligent control systems--Design and construction.
Technology and engineering --Electronics --Microelectronics.
TK7875 / .M52 2012