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Thin Films Material Technology : Sputtering Of Compound Materials /

Adachi, Hideaki. ,

Thin Films Material Technology : Sputtering Of Compound Materials / Hideaki Adachi , Makoto Kitabatake , Kiyotaka Wasa. - xiv, 518 pages : illustrations ; 24 cm.

ISBN: 3642059317 9783642059315

Subjects--Topical Terms:
Cathode sputtering (Planing process).
Thin films.
Surfaces (Technology).

LC Class. No.: TA418.9.T45 / .A32 2004

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