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Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems /

Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems / edited by Martin Feldman. - xxiv, 573 pages : illustrations ; 25 cm. - Woodhead publishing series in electronic and optical materials ; v. 42 .

ISBN: 9780857095008 0857095005

Subjects--Topical Terms:
Nanolithography.

LC Class. No.: TK7874.843 / .N36 2014

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