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System-level modeling of MEMS /

System-level modeling of MEMS / edited by Tamara Bechtold, Gabriele Schrag, Lihong Feng. - xxxii, 530 pages : illustrations ; 25 cm. - Advanced micro & nanosystems .

ISBN: 3527319034 9783527319039 9783527647125

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectromechanical systems --Mathematical models.

LC Class. No.: TK7875 / .S97 2013

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