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Thin-film deposition : principles and practice /

Smith, Donald L. ,

Thin-film deposition : principles and practice / Donald L. Smith. - xxiii, 616 pages : illustrations ; 24 cm.

ISBN: 0070585024

Subjects--Topical Terms:
Thin films.
Vapor-plating.
Thin film devices.

LC Class. No.: TA418.9.T45 / .S64 1995

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