Microsystems technology : fabrication, test and reliability /
Microsystems technology : fabrication, test and reliability /
edited by Jumana Boussey.
- vi, 295 pages : illustrations ; 25 cm.
1903996473
Microelectromechanical systems.
TK7875 / .M52 2003
1903996473
Microelectromechanical systems.
TK7875 / .M52 2003