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Mems packaging /

Mems packaging / edited by Tai-Ran Hsu. - xxix, 275 pages : illustrations ; 26 cm. - EMIS processing series ; 3 .

ISBN: 0863413358

Subjects--Topical Terms:
Microelectromechanical systems.
Microelectronic packaging.

LC Class. No.: TK7875 / .M46 2004

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