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Nano and micro-electromechanical systems : fundamentals of nano- and microengineering /

Lyshevski, Sergey Edward. ,

Nano and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski. - 2nd ed. - 722 pages : illustrations ; 26 cm. - Nano- and microscience, engineering, technology and medicine series .

ISBN: 0849328381

Subjects--Topical Terms:
Microelectromechanical systems.
Nanotechnology.

LC Class. No.: TK7875 / .L97 2005

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