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Micromachined thin-film sensors for SOI-CMOS co-integration /

Laconte, Jean. ,

Micromachined thin-film sensors for SOI-CMOS co-integration / J. Laconte, D. Flandre, J. P. Raskin. - xiii, 292 pages : illustrations ; 25 cm.

Includes bibliographical references and index

ISBN: 9780387288420 0387288422

Subjects--Topical Terms:
Gas flow.
Thin film devices.
Silicon-on-insulator technology.
Metal oxide semiconductors, Complementary.

LC Class. No.: QC168 / .L32 2006

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