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Plasma-aided nanofabrication : from plasma sources to nanoassembly /

Ostrikov, Ken. ,

Plasma-aided nanofabrication : from plasma sources to nanoassembly / Ken Ostrikov, Shuyan Xu. - xiii, 300 pages : illustrations (some color) ; 24 cm.

Includes index and bibliographical references

ISBN: 3527406336 9783527406333

Subjects--Topical Terms:
Nanostructured materials.
Plasma engineering.
Manufacturing processes.
Low temperature plasmas.

LC Class. No.: TA418.9.N35 / .O57 2007

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