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Fundamentals of semiconductor manufacturing and process control /

May, Gary S. ,

Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos. - xviii, 463 pages : illustrations ; 24 cm.

ISBN: 0471784060

Subjects--Topical Terms:
Semiconductors --Design and construction.
Ontegrated circuits --Design and construction.
Process control --Statistical methods.

LC Class. No.: TK7871.85 / .M394 2006

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