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MEMS/MOEMS packaging : concepts, designs, materials and processes /

Gilleo, Ken. ,

MEMS/MOEMS packaging : concepts, designs, materials and processes / Ken Gilleo. - xiii, 220 pages : illustrations ; 24 cm. - McGraw-Hill nanoscience and technology series .

ISBN: 0071455566

Subjects--Topical Terms:
Microelectronic packaging.
Microelectromechanical systems.

LC Class. No.: TK7870.15 / .G55 2005

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