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Into the nano era : Moore's law beyond planar silicon CMOS /

Into the nano era : Moore's law beyond planar silicon CMOS / Howard R. Huff, editor. - xxviii, 343 pages : illustrations ; 24 cm. - Springer series in materials science ; 106 .

ISBN: 9783540745587

Subjects--Topical Terms:
Integrated circuits --History.
Silicon --Electric properties.
Semiconductors --Materials.

LC Class. No.: TK7871.85 / .I58 2009

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