Handbook of advanced plasma processing techniques / (Record no. 40017)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01103cam a22003254i 4500 |
| 001 - CONTROL NUMBER | |
| control field | u151587 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | SIRSI |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20240619150257.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 000405s2000 gw a bf 001 0 eng |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 3540667725 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9783540667728 |
| 050 14 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TA2020 |
| Item number | .S58 2000 |
| 100 1# - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Shul, R.J.. , |
| Relator term | author |
| 9 (RLIN) | 77747 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of advanced plasma processing techniques / |
| Statement of responsibility, etc. | R.J. Shul, S.J. Pearton (editions.). |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE | |
| Place of production, publication, distribution, manufacture | Berlin : |
| Name of producer, publisher, distributor, manufacturer | Springer, |
| Date of production, publication, distribution, manufacture, or copyright notice | 2000. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xvi, 653 pages : |
| Other physical details | illustrations ; |
| Dimensions | 24 cm. |
| 336 ## - CONTENT TYPE | |
| Content type term | text |
| Content type code | txt |
| Source | rdacontent |
| 337 ## - MEDIA TYPE | |
| Media type term | unmediated |
| Media type code | n |
| Source | rdamedia |
| 338 ## - CARRIER TYPE | |
| Carrier type term | volume |
| Carrier type code | nc |
| Source | rdacarrier |
| 380 ## - FORM OF WORK | |
| Form of work | Handbook |
| 596 ## - | |
| -- | 1 3 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma engineering. |
| 9 (RLIN) | 25709 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Electronic circuits. |
| 9 (RLIN) | 1311 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Design and construction. |
| 9 (RLIN) | 170 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Plasma etching. |
| 9 (RLIN) | 19633 |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | S.J. Pearton. |
| 9 (RLIN) | 77748 |
| 907 ## - LOCAL DATA ELEMENT G, LDG (RLIN) | |
| a | .b10486598 |
| b | 07-11-22 |
| c | 31-12-18 |
| 998 ## - LOCAL CONTROL INFORMATION (RLIN) | |
| -- | m |
| Operator's initials, OID (RLIN) | 06-11-22 |
| Cataloger's initials, CIN (RLIN) | m |
| First date, FD (RLIN) | a |
| -- | - |
| -- | eng |
| -- | gw |
| -- | 0 |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH | Main Library General | 18/06/2024 | TA2020 .S58 2000 | 1000312522 | 18/06/2024 | 18/06/2024 | Books - Printed |