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Ultra clean processing of semiconductor surfaces IX : UCPSS 2008 : 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Bruges, Belgium, September 22-24, 2008/ edited by Paul Mertens, Marc Meuris, Marc Heyns.

Contributor(s): Material type: TextTextPublisher: Stafa-Zuerich : Trans Tech, 2009Description: xvi, 400 pagesContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 3908451647
  • 9783908451648
LOC classification:
  • QD543  .U47 2009
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Holdings
Item type Current library Call number Status Date due Barcode
Books - Printed PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General QD543 .U47 2009 (Browse shelf(Opens below)) Available 1000284531

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