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Pulsed and pulsed bias sputtering : principles and applications / by Edward V. Barnat, Toh-Ming Lu.

By: Contributor(s): Material type: TextTextPublisher: Boston : Kluwer Academic, 2003Description: x, 155 pages : illustrations ; 24 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9781402075438
  • 140207543X
Subject(s): LOC classification:
  • TS695  .B37 2003
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