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Atomic Layer Deposition for Semiconductors / edited by Choel Seong Hwang.

Contributor(s): Material type: TextTextPublisher: New York : Springer, 2014Description: x, 263 pages : illustrations (some color) ; 24 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9781461480532
  • 1461480531
Subject(s): LOC classification:
  • TK7871.85  .A86 2014
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Holdings
Item type Current library Call number Status Date due Barcode
Books - Printed PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General TK7871.85 .A86 2014 (Browse shelf(Opens below)) Available 1000318493

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