Smart MEMS and sensor systems / Elena Gaura, Robert M. Newman.

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TextPublisher: New York : World Scientific, 2006Description: xii, 539 pages : illustrations ; 24 cmContent type:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books - Printed	PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General	TK7875 .G38 2006 (Browse shelf(Opens below))	Available		1000188807

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Previous	TK7875 .E52 2004 Enabling technology for MEMS and nanodevices /	TK7875 .E53 2005 Electroceramic-based MEMS : fabrication-technology and applications /	TK7875 .F72 2004 Introduction to microfabrication /	TK7875 .G38 2006 Smart MEMS and sensor systems /	TK7875 .G47 2008 Introduction to microsystem technology : a guide for students /	TK7875 .I57 2007 MEMS technology and devices /	TK7875 .I58 2012 Integrated microsystems : electronics, photonics, and biotechnology /	Next

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