Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.

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TextSeries: Publisher: Weinheim : John Wiley, 2008Description: xx, 303 pages : illustrations ; 25 cmContent type:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books - Printed	PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General	TK7875 .R42 2008 (Browse shelf(Opens below))	Available		1000211570

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Previous	TK7875 .M84 2009 Multi-wafer rotating MEMS machines : turbines, generators and engines /	TK7875 .N45 2009 NEMS/MEMS technology and devices : selected peer reviewed papers from the International Conference on Materials for Advanced Technologies 2009, symposium L, 28 June - 3 July, Singapore /	TK7875 .P76 2012 Properties and processes at the nanoscale : nanomechanics of material behavior : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /	TK7875 .R42 2008 Reliability of MEMS /	TK7875 .R45 2013 Reliability of MEMS : testing of materials and devices /	TK7875 .S42 2006 Post-processing techniques for integrated MEMS /	TK7875 .S54 2006 Silicon carbide microelectromechanical systems for harsh environments /	Next

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