Post-processing techniques for integrated MEMS / Sherif Sedky.

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TextPublisher: Boston : Artech House, 2006Description: xiv, 207 pages : illustrations ; 24 cmContent type:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books - Printed	PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General	TK7875 .S42 2006 (Browse shelf(Opens below))	Available		1000172969

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Previous	TK7875 .P76 2012 Properties and processes at the nanoscale : nanomechanics of material behavior : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /	TK7875 .R42 2008 Reliability of MEMS /	TK7875 .R45 2013 Reliability of MEMS : testing of materials and devices /	TK7875 .S42 2006 Post-processing techniques for integrated MEMS /	TK7875 .S54 2006 Silicon carbide microelectromechanical systems for harsh environments /	TK7875 .S64 2009 Photonic microsystems : micro and nanotechnology applied to optical devices and systems /	TK7875 .S95 2012 MEMS, bioMEMS and bioelectronics--materials and devices : symposium held November 28-December 2, 2011, Boston, Massachusetts, U.S.A. /	Next