TY - BOOK AU - El-Kareh,Badih TI - Silicon devices and process integration: deep submicron and nano-scale technologies SN - 9780387367989 AV - TK7871.99.M44 .E44 2009 PY - 2009/// CY - New York PB - Springer KW - Metal oxide semiconductors,Complementary KW - Linear integrated circuits KW - Design ER -