Ruska, Walter E. W.. , <br/><br/>
Microelectronic processing / 
Walter E. W. Ruska. 
<br/><br/><label>ISBN: </label>0070542805 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits --Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7874   / .R87 1987