TY  - BOOK
AU  - Ruska,Walter E.W..
TI  - Microelectronic processing
SN  - 0070542805
AV  - TK7874  .R87 1987
PY  - 1987///
CY  - New York
PB  - McGraw-Hill
KW  - Integrated circuits
KW  - Design and construction
ER  -