Atomic Layer Deposition for Semiconductors / edited by Choel Seong Hwang. 

 - x, 263 pages :  illustrations (some color) ;  24 cm. 
<br/><br/><label>ISBN: </label>9781461480532 1461480531 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemistry.<br/>Electronics.<br/>Electrical engineering.<br/>Memory management (Computer science).
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .A86 2014