TY  - BOOK
AU  - Mahan,John E.
TI  - Physical vapor deposition of thin films
SN  - 0471330019
AV  - TS695  .M33 2000
PY  - 2000///
CY  - New York
PB  - John Wiley
KW  - Vapor
KW  - Plating
KW  - Thin films
ER  -