Contamination-free manufacturing for semiconductors and other precision products / 
edited by Robert P. Donovan. 
 - 1st ed. 
<br/><br/><label>ISBN: </label>0824703804 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors --Design and construction.<br/>Semiconductors --Defects.
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .C66 2001