TY  - BOOK
AU  - Donovan, R. P.
TI  - Contamination-free manufacturing for semiconductors and other precision products
SN  - 0824703804
AV  - TK7871.85  .C66 2001
PY  - 2001///
CY  - New York
PB  - Marcel Dekker
KW  - Semiconductors
KW  - Design and construction
KW  - Defects
ER  -