Ghandhi, Sorab Khushro. , <br/><br/>
VLSI fabrication principles :  silicon and gallium arsenide / 
Sorab K. Ghandhi. 
 - 2nd ed. 
<br/><br/><label>ISBN: </label>0471580058 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits --Very large scale integration.<br/>Silicon.<br/>Gallium arsenide.
<br/><br/><label>LC Class. No.: </label>TK7874   / .G43 1994