TY  - BOOK
AU  - Ghandhi,Sorab Khushro
TI  - VLSI fabrication principles: silicon and gallium arsenide 
SN  - 0471580058
AV  - TK7874  .G43 1994
PY  - 1994///
CY  - New York
PB  - John Wiley
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
KW  - Gallium arsenide
ER  -